Tunable energy transfer in coupled nonlinear MEMS resonators under parametric modulation for enhanced sensor...

Area of Science:

• Physics
• Engineering
• Nonlinear Dynamics

Background:

• Coherent control of coupled microelectromechanical resonators (MEMS) is crucial for fundamental studies and high-performance sensors.
• Parametric modulation is a key technique for coherent control, but its effects in the nonlinear regime are not fully understood.
• Phenomena like sideband generation and mode splitting in nonlinear MEMS require further investigation.

Purpose of the Study:

• To investigate coherent control of coupled MEMS resonators under strong parametric modulation.
• To demonstrate tunable energy transfer and mode interactions in the nonlinear regime.
• To validate a novel tuning mechanism for enhanced sensor sensitivity.

Main Methods:

• Utilized a weakly coupled double-ended tuning fork (DETF) resonator.
• Employed strong parametric modulation with a red-sideband signal to manipulate intermodal coupling.
• Developed and applied a nonlinear reduced-order model to analyze modal interactions and virtual coupling.
• Validated the concept on a DC electric field sensor.

Main Results:

• Demonstrated tunable energy transfer and mode interactions in nonlinear coupled resonators.
• Observed classical analogs of quantum phenomena through parametric modulation.
• Achieved a two-orders-of-magnitude sensitivity boost in a DC electric field sensor.
• Maintained a broad measurement range for the enhanced sensor.

Conclusions:

• The proposed parametric modulation technique offers effective coherent control in nonlinear coupled MEMS.
• The developed nonlinear model accurately describes the observed dynamics.
• This work paves the way for advanced MEMS sensors with significantly improved performance.
• The findings have implications for optomechanics and two-level systems.