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Updated: Jan 11, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Frequency-Mode Study of Piezoelectric Devices for Non-Invasive Optical Activation
Armando Josué Piña-Díaz1, Leonardo Castillo-Tobar2, Donatila Milachay-Montero3,4
1Departamento de Ingeniería en Control y Automatización, Escuela Superior de Ingeniería Mecánica y Eléctrica Unidad Zacatenco, Instituto Politécnico Nacional, México City 07738, Mexico.
None:
Piezoelectric materials are fundamental elements in modern science and technology due to their unique ability to convert mechanical and electrical energy bidirectionally. They are widely employed in sensors, actuators, and energy-harvesting systems. In this work, we investigate the behavior of commercial lead zirconate titanate (PZT) sensors under frequency-mode excitation using a combined approach of impedance spectroscopy and optical interferometry. The impedance spectra reveal distinct resonance-antiresonance features that strongly depend on geometry, while interferometric measurements capture dynamic strain fields through fringe displacement analysis. The strongest deformation occurs near the first kilohertz resonance, directly correlated with the impedance phase, enabling the extraction of an effective piezoelectric constant (~40 pC/N). Moving beyond the linear regime, laser-induced excitation demonstrates optically driven activation of piezoelectric modes, with a frequency-dependent response and nonlinear scaling with optical power, characteristic of coupled pyroelectric-piezoelectric effects. These findings introduce a frequency-mode approach that combines impedance spectroscopy and optical interferometry to simultaneously probe electrical and mechanical responses in a single setup, enabling non-contact, frequency-selective sensing without surface modification or complex optical alignment. Although focused on macroscale ceramic PZTs, the non-contact measurement and activation strategies presented here offer scalable tools for informing the design and analysis of piezoelectric behavior in micro- and nanoscale systems. Such frequency-resolved, optical-access approaches are particularly valuable in the development of next-generation nanosensors, MEMS/NEMS devices, and optoelectronic interfaces where direct electrical probing is challenging or invasive.
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