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Published on: March 13, 2017
High-performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with
Honghao Zhang1,2, Yulan Lu3,4, Lintao Hu1,2
1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, China.
Abstract:
This paper reports a high performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves. Through theoretical and simulation analysis, the influence of key parameters such as the spacing between anode and cathode, depth of microgrooves and the distribution of vias on the performance of the hydrophone was determined. By using the new microgroove structures, micron-scale anode and cathode spacing was realized and effective cathode areas were greatly enlarged and eventually increased the sensitivities of the hydrophones. Furthermore, a force-balanced negative feedback system was designed to expand the effective working band of the vector hydrophone. The characterization results indicated that the device had ~2 times higher original sensitivities and wider -3dB-bandwidth than that of existing devices. The above results show that the vector hydrophone developed in this work has a wide application scenarios in the field of underwater sound detections.
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