Recent Progress in Low-Power-Consumption Metal Oxide Semiconductor Gas Sensors

Metal oxide semiconductor (MOS) gas sensors offer several advantages, including low cost, high accuracy, and ease of miniaturization. Thus, they are excellent candidates for environmental monitoring and food spoilage detection applications, particularly in the safe Internet of Things field or for portable instruments. Typically, there are two general routes for realizing low-power-consumption MOS gas sensors: room-temperature MOS gas sensors or MEMS MOS gas sensors. The review focuses on the detection of four typical gases, namely methane, hydrogen, carbon monoxide, and nitrogen dioxide, systematically summarizing and analyzing the most recent results of low-power-consumption MOS gas sensors. The 2D materials, MOS composites, and 3D structured composites exhibit excellent room-temperature gas detection capabilities. The mechanism of the room-temperature gas sensors is also discussed in detail. Another route is MEMS MOS gas sensors. First, the progress of the micro-hotplate research is introduced. Then, several of the latest reported MEMS MOS gas sensors are shown and compared. The gas sensing mechanism of these MEMS MOS gas sensors is also given. The paper will provide a valuable guide for researchers in the MOS gas sensor field, particularly for those working towards low-power-consumption MOS gas sensors.