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Simultaneous Multi-surface Anodizations and Stair-like Reverse Biases Detachment of Anodic Aluminum Oxides in Sulfuric and Oxalic Acid Electrolyte
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A Cost-Effective Reference-Less Semiconductor Ion Sensor with Anodic Aluminum Oxide Film.

Yiming Zhong1, Peng Sun2, Zhidong Hou1

  • 1State Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics Innovation, Fudan University, Shanghai 200433, China.

Sensors (Basel, Switzerland)
|November 13, 2025
PubMed
Summary
This summary is machine-generated.

This study introduces a novel reference-less ion sensor (RELESIS) that eliminates bulky electrodes for miniaturized, low-cost applications. The RELESIS demonstrates high pH sensitivity, enabling real-time monitoring of milk freshness.

Keywords:
anodic aluminum oxidepH sensorreference-less

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Area of Science:

  • Materials Science
  • Chemical Engineering
  • Sensor Technology

Background:

  • Ion detection is crucial for industrial and biomedical fields.
  • Traditional ion sensors face limitations like bulkiness, high cost, and poor miniaturization.
  • Existing sensors require expensive reference electrodes, hindering semiconductor integration.

Purpose of the Study:

  • To develop a miniaturized, cost-effective, reference-less ion sensor.
  • To overcome the limitations of traditional ion-sensitive field-effect transistors.
  • To demonstrate a novel sensor platform for portable ion sensing applications.

Main Methods:

  • Fabrication of a reference-less semiconductor ion sensor (RELESIS) using anodic aluminum oxide film.
  • Utilizing a metal-oxide-semiconductor field-effect transistor with an interdigital electrode.
  • Employing anodic oxidation for low-cost fabrication instead of atomic layer deposition.

Main Results:

  • The RELESIS device achieved excellent pH sensitivity (57.8 mV/pH) with low hysteresis (7 mV).
  • Demonstrated real-time, non-destructive monitoring of milk freshness by detecting pH changes.
  • Successfully eliminated the need for a reference electrode, enabling device miniaturization.

Conclusions:

  • The RELESIS offers a promising, low-cost, miniaturized solution for ion sensing.
  • This technology is suitable for next-generation portable systems in food safety, environmental monitoring, and diagnostics.
  • The reference-less design and superior performance pave the way for advanced point-of-care devices.