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Updated: Jan 11, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Published on: November 30, 2012

Optical waveguide facet preparation using programmable focused ion beam sculpting.

Connor D Wong, Henry C Frankis, Bhaveshkumar Kamaliya

|November 14, 2025

Summary

This summary is machine-generated.

Focused ion beam (FIB) sculpting offers a fast, 30-second method for preparing low-loss optical facets on silicon nitride waveguides. This automated technique ensures high optical quality for efficient fiber-chip and chip-chip coupling.

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Last Updated: Jan 11, 2026

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Area of Science:

Photonics
Materials Science
Nanotechnology

Background:

Fabricating photonic devices requires precise preparation of optical facets for efficient light coupling.
Low-loss coupling is crucial for fiber-chip and chip-chip integration in photonic systems.

Purpose of the Study:

To present and demonstrate a focused ion beam (FIB) sculpting method for preparing high-quality optical facets.
To evaluate the efficiency and optical performance of FIB-prepared facets on silicon nitride waveguides.

Main Methods:

Utilized focused ion beam (FIB) sculpting for facet preparation on commercial silicon nitride waveguides.
Investigated the effect of FIB current on facet quality and coupling loss.
Demonstrated a proof-of-concept automated FIB process for scalable facet preparation.

Main Results:

FIB sculpting achieved facet preparation in 30 seconds per facet at 15 nA.
Facets exhibited low coupling loss, primarily due to modal mismatch, indicating high optical quality.
Higher FIB currents led to waveguide facet deformation and increased coupling loss.
An automated process successfully prepared 22 facets without user intervention.

Conclusions:

FIB sculpting is an effective and rapid technique for creating low-loss optical facets for photonic integration.
The demonstrated automated process is material-agnostic and scalable for integrated photonic systems.
FIB sculpting holds potential for creating alignment features for optical integration.