Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and

R Chanson1, F Miserque2, F Schuster3

  • 1Service de recherche en Corrosion et Comportement des Matériaux (S2CM), Université Paris-Saclay, CEA, Gif-sur-Yvette, 91191, France. romain.chanson@cea.fr.

Scientific Reports
|November 14, 2025
PubMed
Abstract