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Updated: Jan 11, 2026

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Secondary electron topographical contrast formation in scanning transmission electron microscopy
Evgenii Vlasov1, Wouter Heyvaert1, Tom Stoops1
1EMAT and NANOlight Center of Excellence, University of Antwerp, Groenenborgerlaan 171, Antwerp, 2020, Belgium.
Abstract:
Secondary electron (SE) imaging offers a powerful complementary capabilities to conventional scanning transmission electron microscopy (STEM) by providing surface-sensitive, pseudo-3D topographic information. However, contrast interpretation of such images remains empirical due to complex interactions of emitted SE with the magnetic field in the objective field of TEM. Here, we propose an analytical physical model that takes into account the physics of SE emission and interaction of the emitted SEs with magnetic field. This enables more reliable image interpretation and potentially lay the foundation for novel 3D surface reconstruction algorithms.
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