Laser Micromachining for Bioelectronics: Past, Present, and Future
1Institute of Biomedical Engineering (IBME), Department of Engineering Science, University of Oxford, Old Road Campus, Headington, Oxford, OX3 7DQ, UK.
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Laser micromachining has emerged over the last decade as a practical alternative to costly, complex photolithography, and to low-resolution printing, for the manufacture of myriad bioelectronic devices. Here, the introduction and development of laser micromachining for bioelectronics is reviewed, and the direction of travel for this fabrication approach is considered. The authors start with early, semi-manual work on laser cutting metal and silicon foils for cochlear and retinal implants, discuss the development of true laser-based lithographic analogues for thin-film material processing, and look at recent work leveraging the localized photothermal effects of lasers to fundamentally alter material properties. The discussion is framed around the various laser systems employed to achieve specific outcomes to inform the reader's choice of system for their own experimental needs.
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