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Tapered Cladding Design for Monolithic Waveguide-Photodetector Coupling in Si-Based Integrated Photonics.

Alfredo A Gonzalez-Fernandez1, Jorge A Vazquez-Hernandez1, Felix Aguilar-Valdez1

  • 1National Institute for Astrophysics, Optics, and Electronics (INAOE), Puebla P.O. Box 51, Mexico.

Nanomaterials (Basel, Switzerland)
|November 26, 2025
PubMed
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We developed a tapered silicon nitride waveguide design for efficient visible light coupling to silicon photodiodes. This CMOS-compatible method enables monolithic photonic-electronic integration for advanced sensing and data processing applications.

Area of Science:

  • Photonics and optoelectronics
  • Materials science
  • Integrated circuit design

Background:

  • Silicon photonics leverages microelectronics infrastructure for enhanced performance.
  • Silicon nitride (Si3N4) offers a wide optical transmission window for photonic components.
  • Monolithic integration of passive nitride photonics with active silicon electronics remains a challenge.

Purpose of the Study:

  • To propose and demonstrate a tapered bottom-cladding design for efficient visible light coupling.
  • To enable monolithic integration of silicon nitride waveguides with silicon photodiodes.
  • To utilize CMOS-compatible processes for scalable fabrication.

Main Methods:

  • Fabrication of Si3N4/SiO2 waveguides using CMOS-compatible processes.
Keywords:
electrophotonicsintegrated photonicsnitride photonicsphotonic sensorssilicon photonics

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  • Controlled reactive ion etching (RIE) for creating vertically tapered claddings.
  • Finite-difference time-domain (FDTD) simulations to analyze coupling efficiency (509-740 nm).

    • Main Results:

    • Simulations predicted >90% transmission efficiency for taper angles <30°, near-total coupling at 10°.
    • Experimental fabrication achieved taper angles as low as 8°.
    • Simulated responsivity reached up to 311 mA W⁻¹ for photodiodes without internal gain.

    Conclusions:

    • Demonstrated feasibility of monolithic Si-based waveguide-photodetector systems.
    • Utilized simple, CMOS-compatible methods for fabrication.
    • Opened a scalable path for integrated photonic-electronic devices in the visible spectrum.