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Direct Fabrication of Inclined-Sidewall Microgrooves with Shaped Flat-Top Beams

Jianyong Mao1, Wenqiang Chen1, Kai Chen2

  • 1Key Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Materials (Basel, Switzerland)
|November 27, 2025
PubMed
Abstract

Keywords:
beam-controlled morphologydirect laser writingflat-top beammicrogroovesingle-pass 3D ablation

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