A Comprehensive Review of Optical Metrology and Perception Technologies

Optical metrology and perception technologies employ light as an information carrier to enable non-contact, high-precision measurement of geometry, dynamics, and material properties. They are widely deployed in industrial and consumer domains, from nanoscale defect inspection in semiconductor manufacturing to environmental perception in autonomous driving and spatial tracking in AR/VR. However, existing reviews often treat individual modalities-such as interferometry, imaging, or spectroscopy-in isolation, overlooking the increasing cross-domain integration in emerging systems. This review proposes a hierarchical taxonomy encompassing four core systems: interferometry, imaging, spectroscopy, and hybrid/advanced methods. It introduces a "theory-application-innovation" framework to unify fundamental principles, application scenarios, and evolutionary trends, revealing synergies across modalities. By mapping technological progress to industrial and societal needs, including AI-driven optimization and quantum-enhanced sensing, this work provides a structured, evolving knowledge base. The framework supports both cross-disciplinary understanding and strategic decision-making, offering researchers and engineers a consolidated reference for navigating the rapidly expanding frontiers of optical metrology and perception.