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Dynamical analysis and adaptive prescribed-performance backstepping control of two electrostatically coupled MEMS
Yeqing Shan1, Guangying Lv1, Fengyun Li2
1College of Mathematics and Statistics, Nanjing University of Information Science and Technology, Nanjing 210044, China.
ISA Transactions
|November 29, 2025
Summary
This study introduces an adaptive control strategy for coupled MEMS resonators, effectively suppressing chaos and improving tracking precision. The novel approach ensures fast convergence and high accuracy in nonlinear systems.
Area of Science:
- Nonlinear Dynamics and Control
- Micro-Electro-Mechanical Systems (MEMS)
Background:
- Coupled MEMS resonators exhibit complex nonlinear dynamics and chaotic behaviors.
- System sensitivity is significantly influenced by these inherent chaotic characteristics.
- Traditional control methods struggle with the complexity and sensitivity of these systems.
Purpose of the Study:
- To perform dynamical analysis of coupled MEMS resonators with nonlinear dynamics.
- To develop an adaptive prescribed-performance backstepping control strategy.
- To address chaos suppression, accelerated convergence, and high-precision control.
Main Methods:
- Establishment of a dynamical model for coupled MEMS resonators.
- Analysis of chaotic behaviors using time histories, phase diagrams, bifurcation diagrams, and Lyapunov exponents.
- Design of a controller using a type-2 fuzzy wavelet neural network (T2FWNN), prescribed performance functions, and an accelerated tracking differentiator (ATD).
- Integration of particle swarm optimization (PSO) for parameter tuning.
Main Results:
- Identification and characterization of chaotic dynamics in the MEMS resonators.
- Successful implementation of adaptive prescribed-performance backstepping control.
- Demonstration of chaos suppression, accelerated convergence, and high-precision tracking.
- Achieved Root Mean Square (RMS) control errors as low as 0.0016.
Conclusions:
- The proposed control scheme effectively manages nonlinear dynamics and chaos in MEMS resonators.
- The adaptive control strategy offers superior performance in accuracy and convergence speed compared to existing methods.
- The T2FWNN and ATD integration successfully mitigates complexity and enhances control precision.
Keywords:
Adaptive prescribed performance backstepping controlChaotic dynamicsCoupled MEMS resonatorsOptimizationT2FWNNMore Related Videos
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