Elucidating the Kinetics and Thermodynamics of Organic Vapor Phase Infiltration and Molecular Layer Deposition for

Brian C Welch1,2, Bratin Sengupta2,3, Ruoke Cai4

  • 1Department of Chemical Engineering Technion - Israel Institute of Technology, Haifa 3200003, Israel.

Chemistry of Materials : a Publication of the American Chemical Society
|December 1, 2025
PubMed

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