High-sensitivity dynamic detection by tapping-mode nanomechanical sensing using an all-fiber microcantilever probe

Area of Science:

• Microscale material characterization
• Nanotechnology
• Sensor development

Background:

• Precise microscale material characterization is crucial for advancements in various scientific fields.
• Existing sensor technologies often face limitations in sensitivity and resolution for microscale applications.

Purpose of the Study:

• To develop and characterize a novel dynamic microforce sensor.
• To integrate a fiber-optic microcantilever probe for tapping-mode atomic force microscopy (AFM).

Main Methods:

• Femtosecond laser two-photon polymerization (TPP) nanolithography to fabricate microstructure cantilever beam probes on fiber end faces.
• Finite element analysis (FEA) for determining dynamic mechanical properties and optimizing the microcantilever structure.
• Parametric modeling for sensor optimization.

Main Results:

• Achieved a microforce sensitivity of 103 Hz/nm.
• Obtained a quality factor (Q) of 326.98.
• Demonstrated a pN-level force detection limit, approximately 17 pN.

Conclusions:

• The developed dynamic microforce sensor offers high sensitivity and a low detection limit for microscale force measurements.
• Its simple structure and parallel probe configuration make it highly promising for applications in quantitative analysis of soft materials and biological samples.