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Scanning Electron Microscopy

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Updated: Jan 9, 2026

Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication

Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication

Published on: November 28, 2017

Nondestructive Imaging and Quantification of Composition in 2D MoS₂ and V‑Doped MoS₂ by the Auger Scatterplot Method.

L'ubomír Vančo¹, Ravi K Biroju^1,2,3, Mário Kotlár¹

¹Centre for Nanodiagnostics of Materials, Faculty of Materials Science and Technology, Slovak University of Technology in Bratislava, Vazovova 5, Bratislava 812 43, Slovakia.

The Journal of Physical Chemistry. C, Nanomaterials and Interfaces

|December 4, 2025

Summary

Auger scatterplots offer a nondestructive method to characterize molybdenum disulfide (MoS₂) surfaces, revealing elemental distributions and V doping effects. This technique enhances Auger electron spectroscopy (AES) accuracy by up to 30% for 2D materials.

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Last Updated: Jan 9, 2026

Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication

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Published on: November 28, 2017

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Published on: April 29, 2020

Area of Science:

Materials Science
Surface Science
Nanotechnology

Background:

Molybdenum disulfide (MoS₂) monolayers are promising 2D materials with properties dependent on surface composition.
Accurate surface characterization is crucial for understanding MoS₂ properties.
Auger electron spectroscopy (AES) is a standard technique but suffers from beam damage and spectral variations.

Purpose of the Study:

To develop a nondestructive method for characterizing MoS₂ and V-doped MoS₂ 2D surfaces.
To overcome limitations of traditional AES, such as beam-induced damage.
To assess elemental distributions and identify S-rich/depleted regions.

Main Methods:

Correlative analysis using Auger scatterplots.
Examination of MoS₂ and V-doped MoS₂ 2D surfaces.
Supportive analysis with Raman spectroscopy and transmission electron microscopy.

Main Results:

Auger scatterplots enable nondestructive imaging of elemental lateral and depth distributions.
V doping in MoS₂ was found to retard desulfurization in Ar/H₂ plasma.
The scatterplot technique improved AES accuracy by up to 30% by reducing electron dose.
Quantitative relationships revealed affinities between surface constituents.

Conclusions:

Auger scatterplots provide a powerful, nondestructive tool for analyzing 2D material surfaces.
The method enhances AES accuracy and offers insights into surface composition and doping effects.
Auger scatterplots correlate with photoluminescence, indicating potential for practical applications in 2D materials.