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Reusable and High-Precision Soft Templates for High-Fidelity Microscale Patterning of Terahertz Metasurface and

Junxiao Liu¹, Yuanpeng Li², Yuanpei Li¹

¹School of Electronic Science and Engineering, and Engineering Center of Integrated Optoelectronic & Radio Meta-chips, University of Electronic Science and Technology of China, Chengdu, 611731, China.

|December 5, 2025

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A new soft template method using photocurable perfluoropolyether (PFPE) enables precise microscale patterning of delicate materials. This versatile technique offers reusability and high-fidelity transfer for advanced electronics and metasurfaces.

Area of Science:

Materials Science
Nanotechnology
Photonics

Background:

Conventional photolithography struggles with microscale patterning of delicate materials for advanced devices.
Challenges include patterning nanoparticle monolayers, polymer substrates, and dielectric resonators for metasurfaces.

Purpose of the Study:

To introduce a versatile strategy for high-precision, non-destructive microscale patterning of diverse functional materials.
To enable the fabrication of next-generation wearable electronics, photonic devices, and metamaterials.

Main Methods:

Utilized photocurable perfluoropolyether (PFPE) to create reusable soft templates guided by photomasks.
Employed these templates for high-fidelity transfer of metal films, composites, and nanoparticle monolayers onto various substrates.

Keywords:

THz metasurface high accurate microscale templates microscale fabrication multi‐functional materials patterning

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Published on: March 23, 2017

Demonstrated precise control over 3D dielectric resonators in millimeter/terahertz (mm/THz) all-dielectric metasurfaces.

Main Results:

Achieved high-precision, non-destructive transfer of functional materials using PFPE soft templates.
PFPE templates demonstrated multiple reuses without loss of patterning fidelity, ensuring cost-effectiveness.
Successfully fabricated 3D dielectric resonators in mm/THz metasurfaces with superior electromagnetic performance.

Conclusions:

The PFPE soft template method offers a versatile, cost-effective solution for microscale patterning of delicate materials.
This approach advances fabrication capabilities for flexible electronics, advanced photonics, and metasurfaces.
Opens new opportunities in microfabrication for next-generation devices.