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Related Experiment Video

Updated: Jun 29, 2026

Surface Enhanced Raman Spectroscopy Detection of Biomolecules Using EBL Fabricated Nanostructured Substrates
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Invited Article: High-quality blazed gratings through synergy between e-beam lithography and robust characterization

Analía F Herrero1,2, Nazanin Samadi3,4, Andrey Sokolov1

  • 1Helmholtz-Zentrum Berlin, Albert-Einstein Str. 15, 12489 Berlin, Germany.

The Review of Scientific Instruments
|December 5, 2025
PubMed
Summary

Manufacturing high-quality blazed gratings for photon science is now more accessible. Electron-beam lithography offers a robust method for producing these critical components, meeting theoretical predictions for synchrotron applications.

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Area of Science:

  • Photon science
  • Optics
  • Materials science

Background:

  • High-quality blazed gratings are essential for VUV-, EUV-, soft-, and tender-x-ray photon science.
  • Current availability of these gratings is limited by technological challenges and manufacturing constraints.

Purpose of the Study:

  • To develop and demonstrate a method for manufacturing high-quality blazed gratings using electron-beam lithography (EBL).
  • To investigate parameters affecting the optical performance of blazed gratings produced via EBL.
  • To establish a robust manufacturing process for synchrotron-based science applications.

Main Methods:

  • Utilized electron-beam lithography (EBL) for grating fabrication.
  • Employed polymethyl methacrylate (PMMA) as a positive tone resist.
  • Applied ion beam etching for precise profile creation.
  • Investigated various process parameters influencing grating efficiency.

Main Results:

  • Developed a robust EBL-based manufacturing process for blazed gratings.
  • Achieved high-quality blazed profiles suitable for photon science.
  • Demonstrated excellent agreement between the measured efficiency of EBL-fabricated gratings and theoretical predictions.

Conclusions:

  • Electron-beam lithography provides a viable and effective method for producing high-quality blazed gratings.
  • The developed process overcomes current manufacturing limitations, improving availability for synchrotron science.
  • The results validate the potential of EBL for advanced optical component fabrication.