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Development and validation of an interface for automated image acquisition during high-temperature environmental

J Lautru¹, R Podor¹

¹ICSM, CEA, CNRS, ENSCM, Univ Montpellier, Marcoule, France.

Micron (Oxford, England : 1993)

|December 7, 2025

Abstract:

An interface that enables automatic image acquisition during high-temperature experiments in an environmental SEM is developed. It is optimized to work on multiple regions of interest at multiple magnifications, performing image focusing (focus and astigmatism) and automatic re-centering of regions of interest. Its operation has been validated by monitoring two regions of interest of a nickel-based superalloy undergoing oxidation at 950 °C at different magnifications. Recording series of images at different magnifications on different regions of interest makes it possible to qualify the behavior of different areas of the sample in a single operation and/or to validate the reproducibility of the observations.

Keywords:

ESEM High temperature Image acquisition Interface SEM

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