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Updated: Jan 9, 2026

Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
Enhanced Microwave Commutation Quality Factor of Tunable Capacitors Based on SrTiO3 Thin Films
Andrei Tumarkin1, Alexey Bogdan1, Eugeny Sapego1
1Department of Physical Electronics and Technology, Saint Petersburg Electrotechnical University "LETI", 197022 Saint Petersburg, Russia.
Abstract:
Thin films of strontium titanate were grown on a polycrystalline aluminum oxide substrate using magnetron sputtering. These films exhibit high structural quality and nonlinear properties, which make them promising for microwave applications. Planar capacitors based on SrTiO3 films demonstrated a tunability of 1.65 with a microwave Q-factor of at least 110 in the entire range of control voltages without deterioration of losses, and a slow capacitance relaxation level no more than 4%, which is significantly better than currently published data for planar ferroelectric elements. This is the first successful attempt to create a planar SrTiO3 capacitor on an alumina, which demonstrates a commutation quality factor CQF of 3300 at microwaves.
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