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Updated: Jan 8, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Dopant Site Occupancy Determined by Core-Loss-Filtered, Position-Averaged Convergent Beam Electron Diffraction
Michael Deimetry1, Timothy C Petersen2, Matthew Weyland2,3
1School of Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia.
Core-loss-filtered convergent beam electron diffraction patterns can quantify dopant site occupancy in crystals. This advanced electron microscopy technique offers a new method for materials analysis.
Area of Science:
- Materials Science
- Solid-State Physics
- Electron Microscopy
Background:
- Convergent beam electron diffraction (CBED) and its probe position-averaged variant (PACBED) are established techniques for analyzing crystal structure.
- PACBED patterns are effective for determining specimen thickness and crystal tilt.
- Quantifying dopant site occupancy typically requires techniques like X-ray spectroscopy.
Purpose of the Study:
- To demonstrate the utility of core-loss-filtered PACBED patterns for measuring dopant site occupancy.
- To adapt strategies from energy dispersive X-ray spectroscopy for electron diffraction analysis.
- To overcome quantification challenges using simulations.
Main Methods:
- Simulating core-loss-filtered PACBED patterns.
- Applying reciprocity principles between scanning and conventional transmission electron microscopy.
- Interpreting diffraction patterns using a modified Cliff-Lorimer approach.
Main Results:
- Core-loss-filtered PACBED patterns can determine the site occupancy of dopants in known crystal structures.
- A measurement-based quantification strategy is limited by elemental interaction ranges.
- Comparison with simulations incorporating generalized Cliff-Lorimer k-factors overcomes quantification limitations.
Conclusions:
- Core-loss-filtered PACBED is a viable method for site-specific dopant analysis.
- Simulations are crucial for accurate quantification when elemental interaction differences exist.
- This technique enhances the capabilities of transmission electron microscopy for materials characterization.
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