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Updated: Jan 8, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Broadband acousto-optic modulators on Silicon Nitride.

Scott E Kenning¹, Tzu-Han Chang¹, Alaina G Attanasio¹

¹OxideMEMS Lab, Purdue University, West Lafayette, IN, USA.

Nature Communications

|December 17, 2025

Summary

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We developed a new broadband acousto-optic modulator for silicon nitride photonics, enabling precise optical control. This innovation enhances chip-scale quantum and classical optical systems.

Area of Science:

Integrated photonics
Materials science
Quantum optics

Background:

Silicon nitride photonics offers ultra-low optical losses, ideal for chip-scale classical and quantum systems.
Phase modulators are essential for low-noise control but broadband operation is challenging due to weak optical confinement.

Purpose of the Study:

To demonstrate an optically broadband acousto-optic modulator architecture on silicon nitride platforms.
To overcome limitations of existing phase modulators for improved optical control.

Main Methods:

Designed a compact spiral structure enabling long modulation lengths.
Integrated acousto-optic modulation into a silicon nitride photonic platform.

Main Results:

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Related Experiment Videos

Last Updated: Jan 8, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Published on: June 18, 2020

Achieved a Vπ of 8.98 V at 704 MHz.

Demonstrated an optical bandwidth exceeding 90 nm at telecom wavelengths.

Successfully integrated the modulator into an optomechanical sensing control loop.

Conclusions:

The developed acousto-optic modulator architecture is optically broadband and suitable for silicon nitride photonics.
This technology enables enhanced control for chip-scale optical systems, including optomechanical sensors.