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High-precision liquid reference Fizeau interferometry with motionless phase-shifting method and tilt-suppressed

Nianfeng Wang, Zhiyao Ma, Shengxi Wang

    Optics Express
    |December 19, 2025
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    Summary
    This summary is machine-generated.

    This study introduces a high-precision Fizeau interferometry system using a liquid reference. The novel method significantly improves measurement accuracy by suppressing tilt errors, enhancing surface shape analysis.

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    Area of Science:

    • Optical Metrology
    • Precision Engineering

    Background:

    • Traditional Fizeau interferometry faces challenges with surface flatness assumptions and environmental disturbances.
    • Liquid surfaces can be affected by factors like edge infiltration, altering their shape over time.

    Purpose of the Study:

    • To develop a high-precision Fizeau interferometry system utilizing a liquid reference for enhanced measurement accuracy.
    • To investigate methods for suppressing tilt errors in interferometric measurements.

    Main Methods:

    • A motionless temporal polarization phase-shifting method with a liquid crystal variable retarder for stable phase shifting.
    • Utilizing 100cSt dimethyl silicone oil as a liquid reference in the interference module.
    • Employing the conjugate differential method for orthogonal translation and surface shape acquisition of the liquid reference.

    Main Results:

    • The liquid reference movement suppresses tilt errors from motorized stage guidance, leveraging liquid properties and gravity.
    • Environmental vibrations, mechanical movement, and drift-induced tilt errors are mitigated through averaging and high-precision measurement constraints.
    • Experimental results demonstrate a 1.07 nm improvement in the standard deviation of residual vertical diameter lines after calibration.

    Conclusions:

    • The developed liquid reference Fizeau interferometry system offers superior precision and stability.
    • The conjugate differential method effectively addresses liquid surface shape deviations and suppresses tilt errors.
    • This approach significantly enhances the accuracy of optical surface metrology.