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    This study introduces a new method for structured illumination microscopy (SIM) to improve surface topography measurement speed and accuracy. The complementary binary fringe difference technique enables faster optical sectioning for precise micro- and nanoscale surface analysis.

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    Area of Science:

    • Optical Metrology
    • Microscopy Techniques
    • Surface Topography Measurement

    Background:

    • Structured illumination microscopy (SIM) is crucial for micro- and nanoscale surface topography.
    • Conventional phase-shifting SIM requires multiple images, limiting measurement speed and accuracy.
    • A need exists for faster, more accurate optical sectioning methods in SIM.

    Purpose of the Study:

    • To develop a novel method for rapid optical sectioning in SIM.
    • To enhance the speed and accuracy of micro- and nanoscale surface topography measurements.
    • To overcome the limitations of conventional phase-shifting techniques in SIM.

    Main Methods:

    • Proposed a complementary binary fringe difference method for SIM.
    • Utilized theoretical derivation and simulation experiments to validate the approach.
    • Employed Gaussian function fitting to determine depth positions from axial intensity profiles.

    Main Results:

    • The complementary binary fringe difference method yields an axial intensity profile approximating a symmetric Bessel function.
    • Demonstrated effective optical sectioning at each layer.
    • Achieved a root-mean-square error of 29 nm on a 1.8 µm step-height sample.

    Conclusions:

    • The proposed method significantly improves optical sectioning in SIM.
    • This technique offers a faster and accurate alternative for surface shape measurement.
    • Validated effectiveness for micro- and nanoscale surface topography analysis.