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Related Experiment Video

Updated: Jan 8, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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Detection and correction of mosaic grating errors based on optical vortex phase-shifting interference.

Lingzhi Liu, Lei Xin, Zhongming Yang

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    |December 19, 2025
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    Summary
    This summary is machine-generated.

    This study introduces a novel method for detecting and correcting errors in large mosaic gratings using dual-wavelength optical vortex polarization phase-shifting interference. The technique achieves high-resolution measurements for precise grating fabrication.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Nanofabrication

    Background:

    • Mosaic grating technology is crucial for fabricating large-size gratings.
    • Existing methods face challenges in detecting and correcting mosaic errors accurately.
    • Precise error detection is essential for high-performance optical systems.

    Purpose of the Study:

    • To propose a novel method for detecting and correcting mosaic grating errors.
    • To develop a dedicated system for mosaic error detection.
    • To validate the accuracy and resolution of the proposed technique.

    Main Methods:

    • Utilized dual-wavelength optical vortex polarization phase-shifting interference.
    • Designed a mosaic error detection system employing an optical vortex reference beam.
    • Quantified errors by analyzing interference fringe patterns and applying a dual-wavelength algorithm for translational error range extension.

    Main Results:

    • Achieved measurement resolutions of approximately 1'' for angular alignment errors (Δθx and Δθy).
    • Demonstrated measurement resolutions of approximately 2 nm for translational alignment errors (Δz and Δx).
    • Experimental validation confirmed the method's high accuracy, extended measurement range, and robust stability.

    Conclusions:

    • The proposed dual-wavelength interference method provides a novel and general approach for mosaic grating error detection and correction.
    • This technique enhances the fabrication accuracy of large-size gratings.
    • Offers significant improvements in measurement resolution and range for optical metrology.