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Updated: Jan 8, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Zhen Yang1,2, Zheng Zhang1, Peng Cheng1
1Laboratory of Infrared Materia and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo, Zhejiang, 315211, China.
We developed a temperature-insensitive tantalum oxide (Ta2O5) microdisk resonator. This device achieves a high Q-factor and stable performance, making it ideal for integrated photonics and precision sensing applications.
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