Gold(I) alkoxide and thiolate complexes as potential atomic layer deposition precursors

Nicholas A Hoffman1, David J H Emslie1

  • 1Department of Chemistry, McMaster University, 1280 Main St West, Hamilton, Ontario, L8S 4M1, Canada. emslied@mcmaster.ca.

Summary

Gold(I) alkoxide and thiolate complexes were synthesized and characterized. The alkoxide complex 3 demonstrated optimal thermal stability and volatility for potential applications in atomic layer deposition (ALD) of gold.

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