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Updated: Jan 7, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Electronics for a DC readout of a MEMS gravimeter with very high amplification and small drift
Alejandro Sandoval1, Roberto Hinojosa1, Daniel Teran1
1Instituto de Física, Universidad Autónoma de San Luis Potosí, SLP 78295, Mexico.
Abstract:
Microelectromechanical systems (MEMSs) based gravimeters are a convenient solution for field applications. For some of these devices, their readout relies on measuring the mass displacement using the signal change in a quadrant detector. Reaching a precision at the μGal level depends on having a very high signal-to-noise ratio. In this paper, we present an electronic circuit that achieves an enhanced amplification by continuously removing the offset in the signal. We obtain the extra amplification without reducing the full dynamic range of the sensor and without adding any additional drifts coming from thermal variations.
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