Direct In Situ Cascade Photolithography of Perovskite Quantum Dot Patterns with High Light Conversion Efficiency and
Zihui Li1, Jifei Ge1, Chengbo Wang1
1Beijing Key Laboratory of Construction Tailorable Advanced Functional Materials and Green Applications, School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China.
ACS Applied Materials & Interfaces
|January 7, 2026
Summary
Researchers developed a new photolithography technique using perovskite quantum dots (PQDs) to create stable, efficient color-converting patterns for micro-LED displays. This method significantly improves blue light absorption and light conversion efficiency, overcoming previous stability issues.
Area of Science:
- Optoelectronics and Materials Science
- Nanotechnology and Photonics
Background:
- Quantum dots (QDs) are crucial for micro-light-emitting diodes (Micro-LEDs) due to their optical properties.
- Perovskite quantum dots (PQDs) offer high light conversion efficiency (LCE) but face challenges with blue light leakage and operational stability.
- Existing QD-based color conversion methods for Micro-LEDs struggle with stability and efficiency.
Purpose of the Study:
- To fabricate stable and efficient perovskite quantum dot (PQD) patterns for Micro-LED displays.
- To address challenges of blue light leakage and limited operational stability in QD-based color conversion.
- To develop a direct in situ photolithography method for creating high-resolution PQD patterns.
Main Methods:
- Developed a cascade curing process integrated into direct in situ photolithography.
- Utilized a thiol-ene click reaction for pattern generation, followed by PQD formation.
- Employed thermal cross-linking of an epoxy-amine system during postbaking to enhance PQD stability.
Main Results:
- Successfully fabricated colorful PQD patterns with 10 μm resolution, high uniformity, and robust stability.
- Achieved 99% blue light absorption and an LCE of 38% in a 3.9 μm-thick film.
- Demonstrated sustained PQD performance, retaining over 80% LCE after 100 hours of continuous blue light exposure.
Conclusions:
- The in situ cascade photolithography technique effectively enhances PQD concentration and stability.
- This method offers a promising solution for stable and efficient color conversion in Micro-LEDs.
- The developed PQD patterns show significant potential for integration into advanced optoelectronic devices.


