On-Chip Silicon-Based Micro-Reflector Pixelated with Micro-Light-Emitting Diodes for Augmented Reality Projection...

Augmented reality (AR) displays demand optical engines that are compact, efficient, and highly directional. While micro-light-emitting diodes (µLEDs) provide exceptional brightness, fast response, and low power consumption, their poor light extraction and near-Lambertian emission severely limit optical coupling in AR systems. Here, we introduce a pixel-by-pixel on-chip silicon-based micro-reflector device (SMRD) for µLEDs that simultaneously integrates light-extraction enhancement and beam shaping within a scalable architecture. Simulation and experimental results show that the SMRD narrows the emission divergence from ±70.5° to ±39.4°, enhances luminous flux within ±20° by ∼64%, and suppresses pixel crosstalk to 4.75%. Beyond device-level improvements, a near-eye display prototype integrating the µLED/SMRD device with a projection lens, beam splitter, metal mask, and a camera acting as an eye substitute further verifies its system-level performance. The SMRD thus delivers a compact and fabrication-compatible route toward high-efficiency, miniaturized AR projection engines. This work establishes a foundation for µLED-based light-field control, with implications for next-generation near-eye displays, spatial light modulators, and advanced photonic systems.