Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review

Recent advances in microelectromechanical systems (MEMS) resonators have enabled the development of compact devices capable of precise magnetic and electric field sensing. This review focuses on resonant MEMS sensors that employ electrostatic actuation, offering advantages such as low power consumption, fast mechanical response, and CMOS-compatible fabrication. We classify two primary types of resonant MEMS sensors based on their sensing mechanisms, where magnetic field sensors utilize electromagnetic induction and electric field sensors rely on electrostatic induction. For each type, we analyze representative devices in terms of actuation schemes, resonator design strategies, sensitivity enhancement techniques, and directional detection capability. We also address key design considerations and fabrication constraints. The review summarizes current approaches and characteristics of MEMS resonator-based magnetic and electric field sensors with a focus on their structural principles and application contexts. Through this analysis, the review aims to provide insights that support the development of next-generation field sensors for applications in navigation, biomedical diagnostics, vehicle detection, and non-destructive evaluation of electrical systems.