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Beyond binary patterning: polypropylene carbonate as a versatile thermal resist for high-fidelity grayscale
Hongtao Li1, Jixiang Li1, Zeming Jin1
1School of Integrated Circuits and Electronics, MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices, Beijing Institute of Technology, Beijing, 100081, China.
Microsystems & Nanoengineering
|January 7, 2026
Summary
Polypropylene carbonate (PPC) enables high-resolution nanopatterning using thermal scanning probe lithography (t-SPL). This technique precisely removes material, creating nanoscale patterns for advanced device fabrication.
Area of Science:
- Materials Science
- Nanotechnology
- Lithography
Background:
- Thermal scanning probe lithography (t-SPL) is a maskless nanopatterning technique.
- Polypropylene carbonate (PPC) exhibits favorable thermal decomposition properties for resist applications.
Purpose of the Study:
- Investigate PPC as a thermal resist for t-SPL.
- Understand PPC's material removal mechanisms (chain unzipping, random scission).
- Optimize t-SPL parameters for PPC nanopatterning.
Main Methods:
- Systematic examination of temperature, tip height, and force pulse effects on PPC films.
- Utilizing localized sublimation of PPC via a heated probe.
- Demonstrating grayscale pattern transfer through dry etching.
Main Results:
- Achieved lateral resolution down to 50 nm and vertical resolution down to sub-nanometer.
- Created controllable stepped cyclic and sinusoidal grayscale patterns.
- Successfully transferred PPC patterns into dielectric layers.
Conclusions:
- PPC is a viable and effective thermal resist for high-resolution t-SPL.
- The t-SPL method with PPC offers precise depth control for nanopatterning.
- Potential applications in photonic and nano-electronic device fabrication are significant.
