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Nanoscale Depth Profiling of Optoelectronic Devices Using Deep-UV LIBS.

Atchutananda Surampudi1, Mool C Gupta1

  • 1Charles L. Brown Department of Electrical & Computing Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

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Summary
This summary is machine-generated.

Deep UV Laser-Induced Breakdown Spectroscopy (LIBS) achieves nanoscale elemental depth profiling at ~10s of nm. This portable method offers high sensitivity for real-time analysis of thin films and semiconductor devices.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Spectroscopy

Background:

  • Accurate elemental nanoscale depth profiling is crucial for advanced materials like semiconductor junctions and optical coatings.
  • Secondary Ion Mass Spectrometry (SIMS) offers nanoscale depth profiling but lacks portability and real-time monitoring capabilities.
  • Laser-Induced Breakdown Spectroscopy (LIBS) provides sensitive elemental detection but typically has limited depth resolution (~μm).

Purpose of the Study:

  • To demonstrate nanoscale elemental depth profiling using deep UV LIBS under ambient conditions.
  • To develop a compact and portable LIBS instrument for real-time characterization.
  • To achieve high depth resolution (~10s of nm) with parts-per-million elemental sensitivity.

Main Methods:

  • Utilized a fiber-coupled 266 nm (UV-C) pulsed laser for deep UV LIBS.
  • Achieved precise ablation depths of ~20-25 nm per pulse.
  • Developed a compact optical head (3 × 2 × 1.5 cm³) with autofocusing and a custom ball lens.

Main Results:

  • Demonstrated nanoscale depth profiling with ~10s of nm resolution.
  • Achieved parts-per-million elemental detection sensitivity.
  • Successfully profiled boron dopants in silicon PV devices (~650 nm), alternating Ta2O5/SiO2 layers in dielectric mirrors (~100-145 nm), and ~1-2 nm native oxide on silicon.

Conclusions:

  • Deep UV LIBS enables high-resolution nanoscale elemental depth profiling under ambient conditions.
  • The developed compact LIBS instrument is suitable for real-time, portable characterization of optical and electronic devices.
  • This technique eliminates the need for vacuum or extensive sample preparation, offering an attractive alternative to traditional methods.