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Updated: Jan 13, 2026

High-speed Particle Image Velocimetry Near Surfaces

High-speed Particle Image Velocimetry Near Surfaces

Published on: June 24, 2013

In-vacuum metrology platform for high precision x-ray mirror surface figure characterization.

Dezhi Diao¹, Jun Han^2,3, Yihang Yao^2,3

¹Zhejiang Institute of Photoelectronics and Zhejiang Institute for Advanced Light Source, Zhejiang Normal University, Jinhua, Zhejiang 321004, China.

The Review of Scientific Instruments

|January 8, 2026

Summary

This study presents a high-precision vacuum metrology system for in situ x-ray mirror monitoring. The system achieves sub-0.1 μrad RMS slope repeatability, crucial for adaptive wavefront corrections under demanding conditions.

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Last Updated: Jan 13, 2026

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Area of Science:

Optics and Metrology
Vacuum Technology
X-ray Optics

Background:

In situ metrology is critical for monitoring x-ray mirror deformations under vacuum and high heat loads.
Adaptive corrections require precise real-time surface figure data.

Purpose of the Study:

To introduce a high-precision vacuum metrology system for in situ x-ray mirror surface figure measurement.
To evaluate system performance under vacuum conditions and assess different optical configurations.

Main Methods:

Development of a vacuum-internal pentaprism long trace profiler system.
Comparison of Internal Optical Path with External Detector (IOP-ED) and external optical head configurations.
Vacuum testing at 200 Pa with a 150 mm scan range on a flat mirror.

Main Results:

Achieved sub-0.1 μrad RMS slope repeatability in vacuum evaluations.
Demonstrated 0.23 μrad RMS systematic errors for the IOP-ED configuration.
Minimized window errors by placing the detector externally.

Conclusions:

The developed system enables precise monitoring of clamping and thermal deformations.
The IOP-ED configuration shows promising results for adaptive wavefront corrections.
Full-vacuum integration is proposed for further stability enhancement.