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In-vacuum metrology platform for high precision x-ray mirror surface figure characterization
Dezhi Diao1, Jun Han2,3, Yihang Yao2,3
1Zhejiang Institute of Photoelectronics and Zhejiang Institute for Advanced Light Source, Zhejiang Normal University, Jinhua, Zhejiang 321004, China.
The Review of Scientific Instruments
|January 8, 2026
Summary
This study presents a high-precision vacuum metrology system for in situ x-ray mirror monitoring. The system achieves sub-0.1 μrad RMS slope repeatability, crucial for adaptive wavefront corrections under demanding conditions.
Area of Science:
- Optics and Metrology
- Vacuum Technology
- X-ray Optics
Background:
- In situ metrology is critical for monitoring x-ray mirror deformations under vacuum and high heat loads.
- Adaptive corrections require precise real-time surface figure data.
Purpose of the Study:
- To introduce a high-precision vacuum metrology system for in situ x-ray mirror surface figure measurement.
- To evaluate system performance under vacuum conditions and assess different optical configurations.
Main Methods:
- Development of a vacuum-internal pentaprism long trace profiler system.
- Comparison of Internal Optical Path with External Detector (IOP-ED) and external optical head configurations.
- Vacuum testing at 200 Pa with a 150 mm scan range on a flat mirror.
Main Results:
- Achieved sub-0.1 μrad RMS slope repeatability in vacuum evaluations.
- Demonstrated 0.23 μrad RMS systematic errors for the IOP-ED configuration.
- Minimized window errors by placing the detector externally.
Conclusions:
- The developed system enables precise monitoring of clamping and thermal deformations.
- The IOP-ED configuration shows promising results for adaptive wavefront corrections.
- Full-vacuum integration is proposed for further stability enhancement.
