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Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing.

Devashish Gokhale¹, Gabriel A Cerrón-Calle², Mitchell L Kim-Fu³

¹Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.

Environmental Science & Technology

|January 14, 2026

Summary

Developing effective per- and polyfluoroalkyl substances (PFAS) waste management technologies is crucial for the semiconductor industry. This review highlights challenges and necessary advancements for PFAS detection and abatement in semiconductor manufacturing.

Keywords:

PFAS monitoring advanced oxidation processes electrochemical degradation fluorine mass balance industry membrane separation semiconductor wastewater

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Area of Science:

Environmental Science
Chemical Engineering
Materials Science

Background:

Semiconductor manufacturing utilizes per- and polyfluoroalkyl substances (PFAS) due to their unique properties.
Environmental regulations and public concern are increasing, necessitating PFAS management strategies.
Eliminating PFAS in semiconductor manufacturing is currently infeasible due to process complexity and long development cycles for alternatives.

Purpose of the Study:

To review recent developments in PFAS detection and abatement technologies for semiconductor manufacturing waste.
To identify key challenges and research questions for effective PFAS waste management in this industry.
To emphasize the need for integrated, high-performance, and industrially relevant PFAS solutions.

Main Methods:

Review of recent scientific literature on PFAS detection and abatement technologies.
Analysis of the unique characteristics of semiconductor manufacturing waste streams.
Identification of critical parameters for testing and validating PFAS management technologies under realistic conditions.

Main Results:

Semiconductor industry PFAS waste streams present unique challenges: low concentrations, complex chemical backgrounds, ultrashort PFAS, large volumes, and multi-phase distribution.
Significant constraints exist regarding space and system redesign for implementing new technologies.
Developing practical, scalable, and cost-effective PFAS detection and abatement solutions requires addressing these specific challenges.

Conclusions:

Practical technologies for PFAS waste management are critical for semiconductor industry growth and environmental compliance.
Integration into compact, high-performance systems and testing under realistic conditions are essential for viable solutions.
Industry collaborations and research focused on semiconductor-specific PFAS waste are vital for scalable and cost-effective outcomes.