Robust interfaces enabled by chemically stable Li3PO4 buffer layer toward high-performance thin-film all-solid-state

Jian Wang1, Xinyi He1, Yonghe Zhuang2

  • 1Key Laboratory of MEMS of the Ministry of Education, School of Integrated Circuits, Southeast University, China.

Summary

Controlling oxygen levels during sputtering deposition enhances lithium phosphate buffer layers in all-solid-state supercapacitors. This improves stability and performance for energy storage and smart window applications.