Low-Density InGaAs/AlGaAs Quantum Dots in Droplet-Etched Nanoholes.

Saimon F Covre Da Silva1,2, Ailton J Garcia1, Maximilian Aigner1

  • 1Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Altenberger Straße 69, 4040 Linz, Austria.

Nano Letters
|January 15, 2026
PubMed
Summary

Epitaxial semiconductor quantum dots (QDs) grown using droplet etching epitaxy in AlGaAs offer tunable wavelengths for quantum photonics. This method yields high-quality QDs with desirable properties for on-demand single and entangled photon generation.

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