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Updated: Jan 20, 2026

Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
Published on: September 28, 2019
Effect of Atomic Layer Deposition of Ultra-Thin Oxide on Reactivity and Durability of Perovskite Oxygen Electrodes
Jongsu Seo1, SungHyun Jeon2,3, Hyunseung Kim2,4
1Hydrogen Research Department, Korea Institute of Energy Research (KIER), Daejeon, Republic of Korea.
Abstract:
Conductive perovskite oxides (ABO3) are key oxygen electrode materials for energy conversion applications, but they suffer from irreversible performance degradation at elevated temperatures due to surface chemical instability. In this study, we investigate how the surface chemical environment and oxygen exchange kinetics of thin-film La0.6Sr0.4CoO3 are affected by the atomic layer deposition of binary oxides-specifically HfO2 and Al2O3. We observe that both HfO2 and Al2O3 overcoats successfully maintain the rapid oxygen exchange rate on the electrode surface. Interestingly, however, their effects on the electrode surface chemistry differ significantly, as do the ideal coating thicknesses, as revealed by X-ray photoelectron spectroscopy, secondary ion mass spectrometry, and transmission electron microscopy analyses. These findings suggest two distinct mechanisms for stabilizing the perovskite surface: the oxide overcoats (1) reduce oxygen vacancies that attract Sr ions to the surface and (2) act as a scavenger, consuming excess surface Sr, and suggest the design principle of a new strategy based on atomic layer deposition to improve perovskite surface durability.
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