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Related Experiment Video

Updated: Jan 21, 2026

Aesthetically Enhanced Silica Aerogel Via Incorporation of Laser Etching and Dyes

Aesthetically Enhanced Silica Aerogel Via Incorporation of Laser Etching and Dyes

Published on: March 12, 2021

3D Customized Silica-Based AFM Probes Fabricated by Selective Laser Etching.

Koutayba Saada¹, David Bourrier¹, Juliette Lignieres¹

¹LAAS-CNRS, Université de Toulouse, CNRS, Toulouse, 31400, France.

|January 20, 2026

Summary

Researchers developed novel silica glass atomic force microscopy (AFM) cantilevers using selective laser etching. This cost-effective, three-step method enhances design flexibility and reduces fabrication time for versatile AFM probes.

Keywords:

3D glass microsystems AFM AFM probes FLICE cantilever selective laser etching (SLE)

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Last Updated: Jan 21, 2026

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Published on: July 2, 2012

Area of Science:

Materials Science
Nanotechnology
Microscopy

Background:

Atomic force microscopy (AFM) relies on cantilevers as crucial force sensors and interaction tools.
Conventional silicon or silicon nitride micro-machining methods for AFM probes are complex, slow, and limit design flexibility.

Purpose of the Study:

To explore the development of innovative AFM cantilevers using silica glass and selective laser etching.
To offer a fabrication method with enhanced design flexibility, reduced cost, and faster production times.

Main Methods:

Utilized selective laser etching for fabricating silica glass AFM cantilevers.
Characterized cantilevers with thicknesses from 1 to 50 µm and spring constants from 0.02 to 80 N/m.

Main Results:

Successfully fabricated functional glass cantilevers with tunable properties.
Demonstrated excellent performance of the glass probes in AFM imaging and force spectroscopy.
Achieved design flexibility and a simplified, cost-effective three-step fabrication process.

Conclusions:

Selective laser etching offers a versatile and efficient method for producing novel silica-based AFM probes.
The developed glass cantilevers show significant potential for advancing AFM applications.
This approach minimizes reliance on complex equipment and cleanroom facilities.