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Related Experiment Video

Updated: Jan 21, 2026

$On-Chip Crystallization and Large-Scale Serial Diffraction at Room Temperature$

On-Chip Crystallization and Large-Scale Serial Diffraction at Room Temperature

Published on: March 11, 2022

Cross-Scale High-Precision Characterization for Three-Dimensional Profiles of Curved Diffractive Microstructures.

Yufang Zhou^1,2, Tao Lai^1,2,3, Huang Li^1,2

¹College of Intelligence Science and Technology, National University of Defense Technology, Changsha, China.

|January 20, 2026

Summary

This summary is machine-generated.

This study introduces a novel 3D method for characterizing curved diffractive microstructures, overcoming limitations of 2D techniques. The new approach precisely maps both macro and micro features for advanced optical manufacturing.

Keywords:

characterization curved blazed grating diffractive optical microstructure laser scanning confocal microscopy sub‐aperture stitching

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$Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction$

Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction

Published on: April 1, 2017

Area of Science:

Optics and Photonics
Materials Science
Metrology

Background:

Optical performance of curved diffractive microstructures is affected by macroscopic errors and microscopic groove parameters.
Conventional 2D profile measurement methods struggle to balance large-area coverage with high resolution, limiting global grating morphology capture.

Purpose of the Study:

To develop a comprehensive three-dimensional (3D) profile characterization method for curved gratings.
To enable cross-scale analysis of both macroscopic and microscopic features.
To improve process optimization and quality control in advanced optical manufacturing.

Main Methods:

Utilized laser scanning confocal microscopy-based stitching measurements for seamless 3D topography reconstruction.
Employed frequency-domain separation and iterative closest point algorithm for preprocessing and feature extraction.
Extended 2D Gabor filter bank to 3D for microstructure period distribution characterization and local planar least-squares fitting for blaze angle analysis.

Main Results:

Achieved seamless reconstruction of full-aperture 3D topography with submicron-scale features.
Precisely characterized 3D spatial distribution of grating blaze angle.
Experimental results showed high agreement with 2D characterization (deviations < 0.01 µm in mean period, < 0.05° in mean blaze angle).

Conclusions:

The proposed 3D method overcomes limitations of 2D line-profile analysis for curved diffractive microstructures.
Enables high-precision, cross-scale global characterization of grating topography.
Supports advanced optical manufacturing through improved process optimization and quality control.