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Multimodal optical microscopy defect detection method for indium bump arrays based on multi-scale Demons deformation

Yifei Li1, Ziyi Wang1, Yong Li2,3

  • 1School of Instrumentation Science and Engineering, Harbin Institute of Technology, Harbin, China.

Journal of Microscopy
|January 20, 2026
PubMed
Summary

This study introduces a new method for detecting defects in infrared focal plane arrays (IRFPAs) by analyzing deformation fields. The technique improves accuracy and reduces false positives in microscopic imaging for industrial inspection.

Keywords:
Demons deformation field differencingdefect detectioninfrared focal plane arrayoptical microscopy

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Area of Science:

  • Materials Science and Engineering
  • Optical Engineering
  • Semiconductor Manufacturing

Background:

  • Indium bump defect detection in infrared focal plane arrays (IRFPAs) faces challenges with low accuracy and high false positives.
  • Subtle deformations, imaging distortions, and scale variations in microscopic images complicate reliable defect identification.

Purpose of the Study:

  • To develop a robust defect detection method for IRFPAs addressing limitations of current techniques.
  • To enhance the accuracy and reduce false positives in identifying subtle defects in microscopic imaging.

Main Methods:

  • Proposed a defect detection method utilizing multi-scale Demons deformation field difference.
  • Implemented a workflow involving global coarse registration, local deformation field optimization, and adaptive defect segmentation.
  • Employed a multi-scale Bilateral Total Variation (BTV)-regularised Demons model for hierarchical deformation field computation.

Main Results:

  • The proposed method demonstrated improved robustness against deformation, noise, and scale variations compared to conventional template-matching algorithms.
  • The approach effectively suppressed noise-induced distortions while preserving critical defect signal transitions.
  • Achieved enhanced saliency of local defect signals for precise identification.

Conclusions:

  • The multi-scale Demons deformation field difference method offers a significant advancement in IRFPA defect detection.
  • The technique meets industrial inspection requirements, providing a framework for weak-feature extraction and precise defect identification.
  • Applicable across various microscopy modalities, including wide-field, bright-field, and dark-field confocal microscopy.