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Updated: Jan 22, 2026

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De-coherent parallel laser processing of ultradense nanopores for high-density, large-area 3D optical phase encoding
Zhendi Jiang1, Jiacheng Hu1, Lijing Zhong2
1State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, China.
Nature Communications
|January 20, 2026
Summary
Researchers developed a new laser writing method to overcome diffraction limits in parallel processing. This technique enables ultra-dense nanopore arrays and high-density 3D phase and polarization coding.
Area of Science:
- Optics and Photonics
- Materials Science
- Nanotechnology
Background:
- Single-beam femtosecond lasers enable sub-diffraction limit modifications.
- Multi-beam parallel processing is hindered by the diffraction limit (~λ/2).
- Existing methods suffer from crosstalk and non-uniformity due to spatial coherence and temporal interference.
Purpose of the Study:
- To overcome the diffraction limit in multi-beam parallel laser writing.
- To enable ultra-dense fabrication of nanostructures.
- To achieve high-density 3D phase and polarization coding.
Main Methods:
- Proposed a de-coherent parallel direct laser writing (Dc-PDLW) strategy.
- Utilized a patterned single pulse and a de-coherent holographic algorithm (SSP-BM).
- Ensured multi-foci polarization orthogonality and eliminated spatial coherence.
Main Results:
- Achieved single-shot fabrication of ultra-dense nanopore arrays with 300 nm (~λ/4) resolution in crystals.
- Demonstrated centimeter-scale 3D Pancharatnam-Berry phase plates.
- Realized high-density 3D phase and polarization coding.
Conclusions:
- The Dc-PDLW strategy effectively overcomes diffraction limitations for parallel processing.
- This method enables high-resolution, high-density 3D nanostructure fabrication.
- The technology has potential applications in advanced optical components and data storage.
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