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Updated: Jan 22, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Gallium Nitride Semiconductor Resonant Tunneling Transistor
Fang Liu1, JunShuai Xue1, GuanLin Wu1
1State Key Laboratory of Wide Bandgap Semiconductor Devices and Integrated Technology, School of Microelectronics, Xidian University, Xi'an, P. R. China.
Researchers developed three-terminal Gallium Nitride (GaN) resonant tunneling transistors (RTTs) for advanced electronics. These RTTs overcome limitations of traditional diodes, enabling tunable negative differential resistance (NDR) and current amplification for beyond binary logic.
Area of Science:
- Semiconductor Physics
- Materials Science
- Nanoelectronics
Background:
- Quantum tunneling devices, like resonant tunneling diodes (RTDs), are crucial for multi-valued logic and memory.
- Gallium Nitride (GaN) based RTDs offer superior properties due to their wide bandgap nature.
- Conventional GaN RTDs lack current gain, hindering functional modulation and performance.
Purpose of the Study:
- To demonstrate a three-terminal GaN resonant tunneling transistor (RTT) overcoming the limitations of two-terminal RTDs.
- To achieve gate-tunable negative differential resistance (NDR) in GaN-based devices.
- To explore enhanced functionalities for nitride-based electronics beyond Moore's Law.
Main Methods:
- Epitaxial integration of an AlN/GaN double-barrier RTD with a GaN high-electron-mobility transistor (HEMT).
- Utilizing the HEMT channel's carrier concentration to tune the NDR characteristics of the integrated RTD.
- Configuring RTTs in series and parallel to analyze voltage span and current amplification.
Main Results:
- Demonstrated gate-tunable NDR behavior in three-terminal GaN RTTs.
- Achieved a significantly enhanced NDR voltage span (4.1 V) in series-connected RTTs compared to conventional RTDs (0.41 V).
- Observed a 10-fold amplification of peak current in parallel-configured RTTs via gate voltage regulation.
Conclusions:
- The developed GaN RTT offers a feasible method for tuning NDR performance.
- This work presents a novel approach for engineering nitride-based electronics with enhanced functionality.
- The RTTs pave the way for beyond binary logic systems and address challenges posed by Moore's Law saturation.
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