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Updated: Jan 24, 2026

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Monte Carlo simulation of secondary electron emission in TixNy based on first principle calculation

Runqi Yan1, Yonggui Zhai1, Hongguang Wang1

  • 1Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China; School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China.

Micron (Oxford, England : 1993)
|January 22, 2026
PubMed

Keywords:
Energy loss functionFirst principle calculationMonte Carlo methodSecondary electron emission

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