Related Experiment Video
Updated: Jan 29, 2026
10:54
Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters
Published on: July 8, 2013
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Fabrication and Plasmonic Characterization of Metasurfaces Patterned via Tunable Pyramidal Interference Lithography
Saim Bokhari1, Yazan Bdour1, Ribal Georges Sabat1
1Department of Physics and Space Science, Royal Military College of Canada, Kingston, ON K7K 7B4, Canada.
Micromachines
|January 28, 2026
Summary
Tunable pyramidal interference lithography (PIL) fabricates large-area metasurfaces with customizable periodic nanostructures. This cost-effective method enables precise control over feature periodicity for photonic and plasmonic applications.
Area of Science:
- Materials Science
- Nanotechnology
- Optics
Background:
- Metasurfaces offer unique optical properties.
- Fabrication of large-area, customizable metasurfaces remains a challenge.
Purpose of the Study:
- To develop a cost-effective and adaptable method for fabricating large-area metasurfaces.
- To demonstrate control over nano- and micro-scale feature periodicity.
- To confirm the functionality of fabricated metasurfaces.
Main Methods:
- Utilized tunable pyramidal interference lithography (PIL) with 2-, 3-, and 4-faced prisms.
- Employed double inline prism setups and prism-lens configurations for periodicity control.
- Coated metasurfaces with gold for plasmonic characterization.
Main Results:
- Successfully fabricated large-area metasurfaces with linear, triangular, and square lattices.
- Achieved systematic control over feature periodicity and pattern size.
- Observed distinct surface plasmon resonance (SPR) and surface plasmon resonance imaging (SPRi) responses.
Conclusions:
- PIL is a versatile and cost-effective technique for producing customizable periodic metasurfaces.
- The fabricated metasurfaces are suitable for photonic, plasmonic, and sensing applications.
- Experimental results were validated by a derived theoretical model.
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