Distance Corrections
Beams
Power Factor Correction
Accelerators
Average Acceleration
Instantaneous Acceleration
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Rashid Ul Haq1,2, Mohammad Rezaei-Pandari3, Xinglong Xie4,5
1National Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, 201800, China.
No abstract available in PubMed .