A miniaturized magnetoresistive chip for full-angle detection based on magnetic films and multilayers
Wei Du1,2,3, Lei Wang1,3, Yibing Zhong1,3
1China Aerospace Science & Technology Corporation No.5 Academy No.513 Institute, Yantai 264003, People's Republic of China.
None:
To develop high-precision and wide-range angular displacement sensing technology suitable for diverse environments, anisotropic magnetoresistance (AMR) chips need to be improved for realizing full-angle detection. In this work, the AMR and anomalous Hall effect (AHE) magnetic films were investigated in detail. It was found that a device combining AMR and AHE enables high-precision full-angle detection. The AMR films with appropriate layout designs enable high-precision angular displacement detection from 0° to 180°, while the AHE films with perpendicular magnetic anisotropy facilitate full-angle detection through magnetic field polarity identification. This research helps to design and optimize the high-precision and wide-range angular displacement sensing technology based on the AMR and AHE films, particularly applicable to fields such as industrial systems, consumer electronics, automation, and medical devices.
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