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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
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Wafer-scale formation of MoS2 with controlled thickness and high uniformity via conversion of MoOx using H2S

Naoya Okada1, Shinichi Tanabe2, Hitoshi Miura3

  • 1Semiconductor Frontier Research Center, National Institute of Advanced Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, 305- 8568, Ibaraki, Japan. okada-naoya@aist.go.jp.

Scientific Reports
|February 5, 2026
PubMed

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