Related Experiment Video
Updated: Feb 7, 2026

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
Structural Superlubricity and Triboelectric Nanogenerators in MEMS: Opportunities, Challenges, and Future Directions
Abstract:
Structural superlubricity (SSL) and triboelectric nanogenerators (TENGs) have emerged as promising solutions to the long-standing challenges of friction, wear, and power supply in microelectromechanical systems (MEMS). This review provides a comprehensive overview of recent advances in these two technologies, with a particular emphasis on their integration within MEMS platforms. This study first examines the fundamental mechanisms, material systems, and fabrication strategies underlying SSL, followed by a detailed discussion of its application in ultra-low-friction components such as microswitches, sliding interfaces, microvalves, and microactuators. This study then summarizes the operating principles and structural modes of TENGs, highlighting their capabilities for self-powered sensing and energy harvesting in scenarios including vibration detection, microfluidic monitoring, tactile interaction, and autonomous micro-energy systems. The synergistic integration of SSL and TENGs is explored as a pathway toward realizing highly reliable, wear-free, and energy-autonomous intelligent microsystems. Finally, this study identifies key technological bottlenecks and outlines future research directions aimed at enabling scalable, long-term operation of next-generation MEMS devices.
More Related Videos
Related Concept Videos
Direct-Acting Cholinergic Agonists: Chemistry and Structure-Activity Relationship
The direct-acting...
Directing Effect of Substituents: meta-Directing Groups
Directing Effect of Substituents: ortho–para-Directing Groups
Structures of Solids
Structural Isomerism
Isomers are different chemical species that have the same chemical formula. Structural isomerism of coordination compounds can be divided into two subcategories, the linkage isomers and coordination-sphere isomers.
Linkage isomers occur when the coordination compound contains a ligand that can bind to the transition metal center through two different atoms. For example, the CN− ligand can bind through the carbon atom or through the nitrogen atom. Similarly, SCN− can...
Structure of Lipids

